Share Email Print
cover

Proceedings Paper

An Instrument For Generation And Control Of Sub-Micron Motion.
Author(s): Alson E. Hatheway
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

This paper describes a new class of instruments that can reliably produce and control small motions. The instrument is intrinsically stiff, stable, athermal and adaptable to very harsh environments. Although the principles may be scaled for large motions, their current application is optimized for the optical wavelength range, a micron to an angstrom or smaller. The paper also describes the "calibrated elasticity" principles used in the development of the instruments.

Paper Details

Date Published: 9 November 1989
PDF: 6 pages
Proc. SPIE 1167, Precision Engineering and Optomechanics, (9 November 1989); doi: 10.1117/12.962961
Show Author Affiliations
Alson E. Hatheway, Alson E. Hatheway Inc. (United States)


Published in SPIE Proceedings Vol. 1167:
Precision Engineering and Optomechanics
Daniel Vukobratovich, Editor(s)

© SPIE. Terms of Use
Back to Top