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Proceedings Paper

Liquid Transport In Micron And Submicron Channels
Author(s): L. J. Kricka; P. Wilding; J. Pfahler; J. Harley; H. Bau; J. N. Zemel
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Paper Abstract

There has been a growth of interest in fluid transport in very small structures. The basis for this interest derives from the application of micromachining technology to problems in fluidics. Several aspects of this problem are reviewed and discussed including some of our recent research on this topic. The problems discussed may be separated into those dealing with biological systems and those that explore the applicability of the macroscopic Navier-Stokes equations to very small planar channels. In the work conducted at the University of Pennsylvania, an experimental investigation of fluid flow in extremely small channels was conducted. Three devices have been constructed with channels of rectangular cross-section ranging in area from 7200 to 80 square microns. It was found that in the relatively large flow channels that the experimental observations were in rough agreement with the predictions from the Navier-Stokes equations. However, in the smallest of the chan-nels, there was a significant deviation from the Navier-Stokes predictions.

Paper Details

Date Published: 9 November 1989
PDF: 11 pages
Proc. SPIE 1167, Precision Engineering and Optomechanics, (9 November 1989); doi: 10.1117/12.962937
Show Author Affiliations
L. J. Kricka, University of Pennsylvania (United States)
P. Wilding, University of Pennsylvania (United States)
J. Pfahler, University of Pennsylvania (United States)
J. Harley, University of Pennsylvania (United States)
H. Bau, University of Pennsylvania (United States)
J. N. Zemel, University of Pennsylvania (United States)

Published in SPIE Proceedings Vol. 1167:
Precision Engineering and Optomechanics
Daniel Vukobratovich, Editor(s)

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