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Proceedings Paper

Precision Electrodisplacive Microactuators
Author(s): Mark A. Ealey
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Paper Abstract

With the advent of "smart structures", a new generation of microactuators and microsensors are required to perform the sensing and micromanipulation functions on micrometer dimensions. Litton/Itek Optical Systems has pioneered the development of precision displacement actuators fabricated from the electroceramic lead-magnesium-niobate (PMN) for the past decade. Both conventional tape cast and advanced photolithographic techniques have been utilized to extend the PMN electroceramic technology to the realm of the microactuator. The microactuators have been fabricated in small sizes, batch processed, and deposited onto PMN substrates. The actuators have produced unsurpassed displacement resolution, set-point accuracy, and dynamic response. More specifically, PMN is a unique point-of-departure material which exhibits negligible hysteresis, a low coefficient of thermal expansion, low power dissipation, and large electrostrains, all important parameters for precision displacement transducers.

Paper Details

Date Published: 9 November 1989
PDF: 18 pages
Proc. SPIE 1167, Precision Engineering and Optomechanics, (9 November 1989); doi: 10.1117/12.962931
Show Author Affiliations
Mark A. Ealey, Litton/Itek Optical Systems (United States)

Published in SPIE Proceedings Vol. 1167:
Precision Engineering and Optomechanics
Daniel Vukobratovich, Editor(s)

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