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Proceedings Paper

Microscopic Digital Imaging Ellipsometry
Author(s): Kazuyoshi Itoh; Takao Chichibu; Yoshiki Ichioka
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Paper Abstract

We present our first step toward digital imaging ellipsometry. The microscope objective and an object is located between a polarizer and an analyzer. We rotate the pair of polarizer and analyzer synchronously keeping the angle between them at right angles. At each rotation angle, the microscope image is sampled and stored successively in a frame memory of an image processor. Simple processing on these images provided us a 2-D distribution of retardations and a 2-D map of the directions of principal axes. Polarization-independent brightness variations were successfully removed by preprocessing.

Paper Details

Date Published: 25 January 1990
PDF: 9 pages
Proc. SPIE 1166, Polarization Considerations for Optical Systems II, (25 January 1990); doi: 10.1117/12.962900
Show Author Affiliations
Kazuyoshi Itoh, Osaka University (Japan)
Takao Chichibu, Osaka University (Japan)
Yoshiki Ichioka, Osaka University (Japan)


Published in SPIE Proceedings Vol. 1166:
Polarization Considerations for Optical Systems II
Russell A. Chipman, Editor(s)

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