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Proceedings Paper

Polarization Micro-Metrology
Author(s): Lionel R. Baker
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Paper Abstract

The precise measurement of micro-images in the fields of surface topography, integrated circuit inspection and microscopy, requires optical sensors and attenuators with wide dynamic range. Polarization techniques with these qualities have long been used in the fields of ellipsometry and polarimetry. This paper describes the use of polarization in a two-channel null microphotometer to quantify various aspects of surface texture such as flaws, waviness and roughness. Recently obtained resultS on the measurement of micro-height variations, texture, line widths and edge location will be presented to illustrate the wide range of metrology possible with this technique.

Paper Details

Date Published: 25 January 1990
PDF: 10 pages
Proc. SPIE 1166, Polarization Considerations for Optical Systems II, (25 January 1990); doi: 10.1117/12.962890
Show Author Affiliations
Lionel R. Baker, Sira Ltd (United Kingdom)

Published in SPIE Proceedings Vol. 1166:
Polarization Considerations for Optical Systems II
Russell A. Chipman, Editor(s)

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