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Proceedings Paper

Vertical Profiling, CD Measurements, And 3D Surface Profiling With A Confocal Laser Scanning Microscope
Author(s): Tom Pommso; D. Awamura; T. Ode
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Paper Abstract

confocal Laser Scanning Microscope has been developed which has many advantages over conventional microscopes in many different applications including small spot profilometry, CD measuring and 3D surface profiling.

Paper Details

Date Published: 20 December 1989
PDF: 12 pages
Proc. SPIE 1164, Surface Characterization and Testing II, (20 December 1989); doi: 10.1117/12.962823
Show Author Affiliations
Tom Pommso, Lasertec USA Inc. (United States)
D. Awamura, Lasertec Corp. (Japan)
T. Ode, Japan (Japan)


Published in SPIE Proceedings Vol. 1164:
Surface Characterization and Testing II
John E. Greivenkamp; Matthew Young, Editor(s)

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