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Proceedings Paper

Development Of An Automatic Focusing Mechanism For An Interference Microscope
Author(s): D. K. Cohen; E. R. Cochran; J. D. Ayres
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Paper Abstract

An autofocus system has been developed for an interference microscope. The basic design tradeoffs and current specifications are described

Paper Details

Date Published: 20 December 1989
PDF: 6 pages
Proc. SPIE 1164, Surface Characterization and Testing II, (20 December 1989); doi: 10.1117/12.962815
Show Author Affiliations
D. K. Cohen, WYKO Corporation (United States)
E. R. Cochran, WYKO Corporation (United States)
J. D. Ayres, WYKO Corporation (United States)


Published in SPIE Proceedings Vol. 1164:
Surface Characterization and Testing II
John E. Greivenkamp; Matthew Young, Editor(s)

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