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Proceedings Paper

Measuring Surface Profiles With The Scanning Tunneling Microscope
Author(s): V. Elings; J. Gurley
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Paper Abstract

In the past two years scanning tunneling microscopy (STM) has expanded rapidly in several areas, over the size range from looking at atoms to looking at integrated circuits. In this paper we will cover some of the recent uses of STM and show some of the three-dimensional surface images which have now become routine.

Paper Details

Date Published: 20 December 1989
PDF: 6 pages
Proc. SPIE 1164, Surface Characterization and Testing II, (20 December 1989); doi: 10.1117/12.962814
Show Author Affiliations
V. Elings, Digital Instruments, Inc. (United States)
J. Gurley, Digital Instruments, Inc. (United States)


Published in SPIE Proceedings Vol. 1164:
Surface Characterization and Testing II
John E. Greivenkamp; Matthew Young, Editor(s)

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