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Proceedings Paper

Image Formation In Common Path Differential Profilometers
Author(s): M. G. Somekh; R. K. Appel
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Paper Abstract

Several systems have recently been developed that apply various modulations onto the optical beams in order to both enhance the contrast from particular features and to reduce the effects of noise and microphonics. Consequently different imaging responses may be obtained at different photodetector output frequencies. This paper analyses a selection of AC profilometer systems by extending the analysis used for the conventional scanning optical microscope.

Paper Details

Date Published: 20 December 1989
PDF: 13 pages
Proc. SPIE 1164, Surface Characterization and Testing II, (20 December 1989); doi: 10.1117/12.962812
Show Author Affiliations
M. G. Somekh, University of Nottingham (England)
R. K. Appel, University of Nottingham (England)

Published in SPIE Proceedings Vol. 1164:
Surface Characterization and Testing II
John E. Greivenkamp; Matthew Young, Editor(s)

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