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Proceedings Paper

Calibration Of Surface Heights In An Interferometric Optical Profiler
Author(s): Katherine Creath
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Paper Abstract

The numerical aperture (NA) of a microscope objective can affect the measurement of surface height profiles. Large NA objectives measure height values smaller than the actual values. An experiment to calibrate these effects on objectives with NAs of 0.1 to 0.95 is described using four traceable step height standards and a computer-controlled interferometric optical profiler utilizing phase-measurement interferometry techniques. The measured NA scaling factors have good agreement with a theory developed by Ingelstam and indicate that the effective NA rather than the nominal NA is the important quantity. NA scaling factors are determined to an uncertainty of ±1% for NAs of 0.5 or less and ±2% for NAs of 0.9 or greater.

Paper Details

Date Published: 20 December 1989
PDF: 8 pages
Proc. SPIE 1164, Surface Characterization and Testing II, (20 December 1989); doi: 10.1117/12.962811
Show Author Affiliations
Katherine Creath, WYKO Corporation (United States)


Published in SPIE Proceedings Vol. 1164:
Surface Characterization and Testing II
John E. Greivenkamp; Matthew Young, Editor(s)

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