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Proceedings Paper

Resolving Interferometric Step Height Measurement Ambiguities Using A Priori Information
Author(s): John E. Greivenkamp; Kevin G. Sullivan; Russell J. Palum
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Paper Abstract

One of the principal concepts of sub-Nyquist interferometry is the use of all available knowledge about a surface to extend the available measurement range. This paper will explore the use of this a priori information in resolving the ambiguities found in interferometric step-height measurements. Information about the height of a step that has been obtained by another measurement technique or through process parameters, such as etch rate, may be used for this purpose. The theory behind this type of measurement and experimental results are presented.

Paper Details

Date Published: 20 December 1989
PDF: 6 pages
Proc. SPIE 1164, Surface Characterization and Testing II, (20 December 1989); doi: 10.1117/12.962809
Show Author Affiliations
John E. Greivenkamp, Eastman Kodak Company (United States)
Kevin G. Sullivan, Eastman Kodak Company (United States)
Russell J. Palum, Eastman Kodak Company (United States)

Published in SPIE Proceedings Vol. 1164:
Surface Characterization and Testing II
John E. Greivenkamp; Matthew Young, Editor(s)

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