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Proceedings Paper

Effects Of The Optical Transfer Function In Surface Profile Measurements
Author(s): E. L. Church; P. Z. Takacs
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Paper Abstract

The effects of the measurement transfer function in a Wyko-like profiling microscope have been explored analytically, and large attenuations found over the upper half Hof the optical bandpass. In the case of corrugated surfaces these effects can be eliminated using a universal inverse-filtering routine. In the case of isotropically-rough surfaces the effects are larger, and although restoration is possible, no universal filter exists.

Paper Details

Date Published: 20 December 1989
PDF: 14 pages
Proc. SPIE 1164, Surface Characterization and Testing II, (20 December 1989); doi: 10.1117/12.962806
Show Author Affiliations
E. L. Church, USA ARDEC (United States)
P. Z. Takacs, Brookhaven National Laboratory (United States)

Published in SPIE Proceedings Vol. 1164:
Surface Characterization and Testing II
John E. Greivenkamp; Matthew Young, Editor(s)

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