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Proceedings Paper

Profile Measurement By Projecting Phase-Shifted Interference Fringes
Author(s): S. Kakunai; K. Iwata; M. Hasegawa; T. Sakamoto
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Paper Abstract

Profile measurement using phase-shifted interference fringe projection technique is described and discussed. This method realizes the measurement by projecting interference fringe patterns on the object surface and by observing the deformed fringe pattern at the direction different from the projection. To obtain the information finer than the fringe spacing, phase-shifting technique is adopted. This technique needs no fine fringe pattern to improve lateral resolving power as it gives height distribution at all the picture elements over the object image. Discussions are made on errors inherent to the method, including the error depending on intensity quantization and number of phase-shifting steps.

Paper Details

Date Published: 20 November 1989
PDF: 10 pages
Proc. SPIE 1163, Fringe Pattern Analysis, (20 November 1989); doi: 10.1117/12.962788
Show Author Affiliations
S. Kakunai, Himeji Institute of Technology (Japan)
K. Iwata, University of Osaka Prefecture (Japan)
M. Hasegawa, Himeji Institute of Technology (Japan)
T. Sakamoto, Himeji Institute of Technology (Japan)


Published in SPIE Proceedings Vol. 1163:
Fringe Pattern Analysis
Graeme T. Reid, Editor(s)

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