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Proceedings Paper

Wavelength Scanning Interferometry For The Measurement Of Both Surface Shapes And Refractive Index Inhomogeneity
Author(s): Katsuyuki Okada; Jumpei Tsujiuchi
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Paper Abstract

A wavelength scanning interferometer is proposed for measuring both the shapes of the front and the rear surfaces and the inhomogeneity of the refractive index of an optical parallel plate. To separate the superimposed interferograms generated with many wavefronts reflected from the plate, it is utilized the property of a wavelength scanning interferometry that the phase shift associated with wavelength shift is in proportion to the optical path difference of the interfering beams. By an experiment, the rms error of the measurement is shown to be less than 1/50 wavelength.

Paper Details

Date Published: 25 April 1990
PDF: 7 pages
Proc. SPIE 1162, Laser Interferometry: Quantitative Analysis of Interferograms: Third in a Series, (25 April 1990); doi: 10.1117/12.962766
Show Author Affiliations
Katsuyuki Okada, Chiba University (Japan)
Jumpei Tsujiuchi, Chiba University (Japan)


Published in SPIE Proceedings Vol. 1162:
Laser Interferometry: Quantitative Analysis of Interferograms: Third in a Series
Ryszard J. Pryputniewicz, Editor(s)

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