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Proceedings Paper

Profile Measurement With A Phase-Shifting Common-Path Polarization Interferometer
Author(s): Koichi Iwata; Takayuki Nishikawa
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Paper Abstract

A common-path polarization interferometer is constructed for measuring microscopic surface profile. A double-focus lens made of birefringent material is used to divide the wave. To detect phase difference smaller than unit fringe, phase-shifting technique is adopted. This optical system is expected to be insensitive to vibration, temperature variation and air draft because of its common-path geometry. With this system microscopic surface profiles of some samples are measured. The measurements confirm its insensitiveness to vibration. On the basis of the results of the experiment, some problems for this type of an interferometer are discussed.

Paper Details

Date Published: 25 April 1990
PDF: 6 pages
Proc. SPIE 1162, Laser Interferometry: Quantitative Analysis of Interferograms: Third in a Series, (25 April 1990); doi: 10.1117/12.962765
Show Author Affiliations
Koichi Iwata, University of Osaka Prefecture (Japan)
Takayuki Nishikawa, University of Osaka Prefecture (Japan)

Published in SPIE Proceedings Vol. 1162:
Laser Interferometry: Quantitative Analysis of Interferograms: Third in a Series
Ryszard J. Pryputniewicz, Editor(s)

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