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Proceedings Paper

Linear And Rotary Encoders Using Electronic Speckle Correlation
Author(s): Ichirou Yamaguchi; Tadashige Fujita
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Paper Abstract

Speckle patterns can be used as natural surface markings which are printed by high coherence of laser light. Speckle displacement caused by linear or rotary motion of a surface is detected with a linear image sensor whose outputs are analyzed by a correlator. By using an image sensor of the pitch 15 pm and 1024 elements, resolution of a micrometer and 1/1000° have been attained. Main advantages of the encoders are extreme simplicity in optical configurations and wide ranges of measurement.

Paper Details

Date Published: 25 April 1990
PDF: 14 pages
Proc. SPIE 1162, Laser Interferometry: Quantitative Analysis of Interferograms: Third in a Series, (25 April 1990); doi: 10.1117/12.962748
Show Author Affiliations
Ichirou Yamaguchi, The Institute of Physical and Chemical Research (Japan)
Tadashige Fujita, Gakushuin University (Japan)


Published in SPIE Proceedings Vol. 1162:
Laser Interferometry: Quantitative Analysis of Interferograms: Third in a Series
Ryszard J. Pryputniewicz, Editor(s)

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