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Proceedings Paper

Optical Testing Using Laser Feedback Metrology
Author(s): Peter de Groot; Gregg Gallatin; George Gardopee
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Paper Abstract

The sensitivity of laser diodes to small amounts of optical feedback provides the basis for a remarkably simple and versatile tool for interferometric metrology of optical elements and systems. The tool uses a simple optical scanner and phase tracking to analyse wavefronts and is particularly useful for obtaining surface profiles of strongly aspheric mirrors. Surface profiles have been obtained to an accuracy of 100 nm in the presence of extremely high (1011/mm) departures from spherical.

Paper Details

Date Published: 25 April 1990
PDF: 9 pages
Proc. SPIE 1162, Laser Interferometry: Quantitative Analysis of Interferograms: Third in a Series, (25 April 1990); doi: 10.1117/12.962738
Show Author Affiliations
Peter de Groot, Perkin-Elmer Corporation (United States)
Gregg Gallatin, Perkin-Elmer Corporation (United States)
George Gardopee, Perkin-Elmer Corporation (United States)


Published in SPIE Proceedings Vol. 1162:
Laser Interferometry: Quantitative Analysis of Interferograms: Third in a Series
Ryszard J. Pryputniewicz, Editor(s)

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