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Proceedings Paper

High Fill Factor 512 X 512 PtSi Focal Plane Array
Author(s): Weng-Lyang Wang; Rusty Winzenread; Buon Nguyen; James J. Murrin; Robert L. Trubiano
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Paper Abstract

A 512 x 512 monolithic PtSi Schottky Barrier Diode (SBD) array that was designed, fabricated and tested at EG&G Reticon will be discussed. The array uses a novel line-addressed charge-accumulation (LACA) CCD in an interline configuration for the vertical registers and a multiple-readout register for high speed readout. The LACA readout structure has two distinct advantages over the conventional interline CCD structure. First, the LACA register occupies a very small area while still providing enough charge handling capacity • for the Schottky barrier detector. As a result, the 30 gm x 30 gm pixels have a fill factor of 54% when designed with a 2.5 Lim minimum dimension CCD process. Secondly, since the register operates in a charge accumulation mode, it has an extremely high effective charge accumulation efficiency. In the horizontal register, four readout structures are used to increase the overall pixel readout rate. A 75 Hz frame rate is achieved when the horizontal clock rate is 5 MHz. A CCD bending structure is utilized at each output to eliminate any coupling from the common clock lines. Each output has an electron sensitivity of greater than 5 0/e. The quantum yield of the platinum silicide SBDs has been between 15 and 25%. The chip dimensions are 748 mil x 748 mil, of which 604 mil x 604 mil is photosensitive.

Paper Details

Date Published: 22 December 1989
PDF: 17 pages
Proc. SPIE 1161, New Methods in Microscopy and Low Light Imaging, (22 December 1989); doi: 10.1117/12.962691
Show Author Affiliations
Weng-Lyang Wang, EG&G Reticon (United States)
Rusty Winzenread, EG&G Reticon (United States)
Buon Nguyen, EG&G Reticon (United States)
James J. Murrin, Rome Air Development Center (United States)
Robert L. Trubiano, Rome Air Development Center (United States)

Published in SPIE Proceedings Vol. 1161:
New Methods in Microscopy and Low Light Imaging
John E. Wampler, Editor(s)

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