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Proceedings Paper

The Soft X-Ray Performance Of Plane And Figured Ni-Ac Multilayer Mirrors
Author(s): Brian L. Evans; Ali M.H. Al -Arab; Shi Xu
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Paper Abstract

In multilayer assemblies consisting of alternating high and low absorption index materials the strongly absorbing (metal) component layer is usually microcrystalline. The crystallite size influences the soft X-ray reflectivity of the stack by determining the effective reflecting area of the stack and the diffuse scattering contribution. The influence of the deposition parameters on the structure of ion-beam sputtered Ni and a-C films is described together with the associated multilayer soft X-ray reflectivity spectra as a function of sputtering energy, d-spacing and film thickness ratio.

Paper Details

Date Published: 28 July 1989
PDF: 7 pages
Proc. SPIE 1160, X-Ray/EUV Optics for Astronomy and Microscopy, (28 July 1989); doi: 10.1117/12.962641
Show Author Affiliations
Brian L. Evans, Reading University (United Kingdom)
Ali M.H. Al -Arab, Reading University (United Kingdom)
Shi Xu, Reading University (United Kingdom)


Published in SPIE Proceedings Vol. 1160:
X-Ray/EUV Optics for Astronomy and Microscopy
Richard B. Hoover, Editor(s)

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