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Proceedings Paper

Absolute Multilayer Characterization At High Spatial Resolution Via Real-Time Soft X-Ray Imaging
Author(s): Larry Madison
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Paper Abstract

An imaging-based technique has been modeled for its suitability and performance in measuring the spatial distribution of the absolute soft x-ray characterization of flat multilayer mirrors. Such a technique, if implemented experimentally, is anticipated to have substantially higher throughput ( wafers/day ) than is possible from prevailing non-imaging means.

Paper Details

Date Published: 27 November 1989
PDF: 9 pages
Proc. SPIE 1159, EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy and Atomic Physics, (27 November 1989); doi: 10.1117/12.962619
Show Author Affiliations
Larry Madison, Lawrence Livermore National Laboratory (United States)


Published in SPIE Proceedings Vol. 1159:
EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy and Atomic Physics
Charles J. Hailey; Oswald H. W. Siegmund, Editor(s)

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