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Proceedings Paper

Influence Of Ion Irradiation On The Properties Of Diamond-Like Carbon Films
Author(s): Fangqing Zhang; Yafei Zhang; Zhihao Zheng; Guanghua Chen
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Paper Abstract

The influence of argon ion and CO2 laser irradiation on the structure properties of diamond-like carbon films is reported. The structure ratio of sp2/sp3-CH bond in the films increases as the argon ion irradiates while it decreases as the CO2 laser irradiates , which show that the argon ion irradiation is main for breaking the C-H bond while the laser irradiation is a kind of process of thermal annealing.

Paper Details

Date Published: 15 January 1989
PDF: 4 pages
Proc. SPIE 1146, Diamond Optics II, (15 January 1989); doi: 10.1117/12.962082
Show Author Affiliations
Fangqing Zhang, Lanzhou University (China)
Yafei Zhang, Lanzhou University (China)
Zhihao Zheng, Lanzhou University (China)
Guanghua Chen, Lanzhou University (China)


Published in SPIE Proceedings Vol. 1146:
Diamond Optics II
Albert Feldman; Sandor Holly, Editor(s)

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