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Proceedings Paper

Cathodoluminescence Imaging And Spectroscopy Of CVD Diamond In A Scanning Electron Microscope
Author(s): L. H. Robins; L. P. Cook; E. N. Farabaugh; A. Feldman
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Paper Abstract

Optically active defects in diamond films grown by the hot-filament chemical vapor deposition method were investigated by cathodoluminescence (CL) imaging and spectroscopy in a scanning electron microscope. A set of films grown on silicon substrates at deposition temperatures (Td) from 600°C to 850° C was studied. The spatial resolution of the CL images was approximately 0.2 to 0.5 μm; CL spectra were measured with wavelength resolution 0.4 nm in the wavelength range 350 to 900 nm.

Paper Details

Date Published: 15 January 1989
PDF: 14 pages
Proc. SPIE 1146, Diamond Optics II, (15 January 1989); doi: 10.1117/12.962074
Show Author Affiliations
L. H. Robins, National Institute of Standards and Technology (United States)
L. P. Cook, National Institute of Standards and Technology (United States)
E. N. Farabaugh, National Institute of Standards and Technology (United States)
A. Feldman, National Institute of Standards and Technology (United States)


Published in SPIE Proceedings Vol. 1146:
Diamond Optics II
Albert Feldman; Sandor Holly, Editor(s)

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