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Proceedings Paper

Optical Detection In Diamond Chemical Vapor Deposition
Author(s): F. G. Celii; P. E. Pehrsson; J. E. Butler
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Paper Abstract

We have employed a variety of in-situ optical diagnostic probes to analyze the filament-assisted diamond deposition gas-phase environment. In this paper, our studies using infrared diode laser absorption and multiphoton ionization spectroscopies are summarized. Emphasis is placed on a recently developed technique for the detection of gas-phase atomic hydrogen using third harmonic generation. The results are discussed in terms of the growth environment, the role of atomic hydrogen, and the carbon deposition mechanism.

Paper Details

Date Published: 15 January 1989
PDF: 5 pages
Proc. SPIE 1146, Diamond Optics II, (15 January 1989); doi: 10.1117/12.962068
Show Author Affiliations
F. G. Celii, Naval Research Laboratory (United States)
P. E. Pehrsson, Naval Research Laboratory (United States)
J. E. Butler, Naval Research Laboratory (United States)

Published in SPIE Proceedings Vol. 1146:
Diamond Optics II
Albert Feldman; Sandor Holly, Editor(s)

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