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Proceedings Paper

Fabrication Of Deep Bragg Gratings For DFB Lasers And Waveguide Filters By Wet And Dry Etching Processes In InGaAsP
Author(s): H. Unzeitig; C. Cremer; G Heise
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Paper Abstract

Mask generation, etching process and cha-racterization of first-order deep Bragg grating corrugations on InP and InGaAsP compound material is presented. DFB lasers with a side-mode suppression of more than 30 dB were obtained. In addition nine different monolithic grating filters on rib waveguides proved to be valuable for narrow-band wavelength division multiplexing (WDM) applications.

Paper Details

Date Published: 6 December 1989
PDF: 5 pages
Proc. SPIE 1141, 5th European Conf on Integrated Optics: ECIO '89, (6 December 1989); doi: 10.1117/12.961902
Show Author Affiliations
H. Unzeitig, Siemens AG (Germany)
C. Cremer, Siemens AG (Germany)
G Heise, Siemens AG (Germany)

Published in SPIE Proceedings Vol. 1141:
5th European Conf on Integrated Optics: ECIO '89

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