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Proceedings Paper

Phase-Modulating Zone Plates For X-Ray Microscopy
Author(s): A. G. Michette; C. J. Buckley
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Paper Abstract

Zone plates made by carbon contamination lithography have been successfully used in the King's College/Daresbury scanning X-ray microscope. However, in their original carbon forms these zone plates suffer from low (~ 1%) diffraction efficiencies, while the outermost zone widths of the higher efficiency gold copies made by contact X-ray lithography are limited to about 50 nm, smaller zones becoming unresolvable due to diffraction effects. In this paper it will be shown that, by shadowing a rotating carbon master through an aperture, efficiencies of up to about 20% in the water-window region and approaching 10% at shorter wavelengths are possible, by selecting the shadowing material and by coating at the correct angles and to the correct thicknesses to utilise phase-modulating effects. Calculated tolerances on the rotation and displacement of the zone plate under the aperture indicate that outermost zone widths will be limited only by the capabilities of the contamination lithography process, which has already demonstrated the possibility of better than 20 nm, and not by the accuracies of available rotation and translation devices.

Paper Details

Date Published: 27 November 1989
PDF: 6 pages
Proc. SPIE 1140, X-Ray Instrumentation in Medicine and Biology, Plasma Physics, Astrophysics, and Synchrotron Radiation, (27 November 1989); doi: 10.1117/12.961865
Show Author Affiliations
A. G. Michette, Max-Planck-Institut fur Quantenoptik (Germany)
C. J. Buckley, National Synchrotron Light Source (United States)

Published in SPIE Proceedings Vol. 1140:
X-Ray Instrumentation in Medicine and Biology, Plasma Physics, Astrophysics, and Synchrotron Radiation
Rene Benattar, Editor(s)

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