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Proceedings Paper

Short Wavelength Imaging Characteristics Of Figured Multilayer Mirrors
Author(s): Brian L. Evans; Ali M. H. Al Arab; Shi Xu
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Paper Abstract

At short wavelengths (λ - 5nm) a highly reflecting multilayer must consist of a large number of layers, in which the layer interfaces are sharply defined and the strongly absorbing (metal) component layers are as thin as possible. The mininum thickness of a microcrystalline metal layer is apparently set by the unit cell dimensions, the lateral dimensions of each microcrystallite, by the deposition conditions and nature of the metal. The influence of these parameters is described and related to the fabrication of short wavelength reflecting mirrors.

Paper Details

Date Published: 27 November 1989
PDF: 5 pages
Proc. SPIE 1140, X-Ray Instrumentation in Medicine and Biology, Plasma Physics, Astrophysics, and Synchrotron Radiation, (27 November 1989); doi: 10.1117/12.961855
Show Author Affiliations
Brian L. Evans, Reading University (United Kingdom)
Ali M. H. Al Arab, Reading University (United Kingdom)
Shi Xu, Reading University (United Kingdom)


Published in SPIE Proceedings Vol. 1140:
X-Ray Instrumentation in Medicine and Biology, Plasma Physics, Astrophysics, and Synchrotron Radiation

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