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Proceedings Paper

Fabrication And Characterization Of Soft X-Ray Beamsplitters
Author(s): J. Susini; C. Khan Malek; A. Madouri; M. Ouahabi; R. Rivoira; J. Bourneix,; R. Barcnewitz
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Paper Abstract

Conception, fabrication and characterization of a beamsplitter working in the soft X-ray range at oblique incidence are presented. A large area beamsplitter is fabricated using microfabrication technology and an inorganic film carrier. Reflectivity and transmission results are compared with calculations.

Paper Details

Date Published: 27 November 1989
PDF: 5 pages
Proc. SPIE 1140, X-Ray Instrumentation in Medicine and Biology, Plasma Physics, Astrophysics, and Synchrotron Radiation, (27 November 1989); doi: 10.1117/12.961851
Show Author Affiliations
J. Susini, ESRF (France)
C. Khan Malek, Laboratoire de Microstructures et Microelectroniaue (France)
A. Madouri, Laboratoire de Microstructures et Microelectronique (France)
M. Ouahabi, Laboratoire de Chimie -Physique (France)
R. Rivoira, Universite d'Aix-Marseille III (France)
J. Bourneix,, Laboratoire de Chimie -Physique (France)
R. Barcnewitz, Laboratoire de Chimie -Physique (France)


Published in SPIE Proceedings Vol. 1140:
X-Ray Instrumentation in Medicine and Biology, Plasma Physics, Astrophysics, and Synchrotron Radiation

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