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Proceedings Paper

Thinned Backside Illuminated Ccds For Ultraviolet, Soft X-Ray And Electron-Beam Imaging
Author(s): C. Tassin; Y. Thenoz; R. Lemaitre; J. Chabbal
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Paper Abstract

THOMSON-CSF is developing thinned CCDs for backside illumination which will provide high quantum efficiency for the detection of UV, soft X-ray and electrons of a few keV. The most critical stage of the process is the backside treatment of the thinned devices : accumulation condition is necessary to prevent recombination of the photoelectrons created near the back surface. The backside process developed at THOMSON-CSF involves a shallow p+ implantation activated by laser annealing. Results obtained on thinned frame-transfer CCDs (576 x 384 Pixels) are presented : a quantum efficiency of 50% at 3500 Å (25°C) and in excess of 60% in the range 4000 Å - 6500 Å (25°C) without antireflection coating. Preliminary results with VUV and soft X-ray are also given.

Paper Details

Date Published: 27 November 1989
PDF: 10 pages
Proc. SPIE 1140, X-Ray Instrumentation in Medicine and Biology, Plasma Physics, Astrophysics, and Synchrotron Radiation, (27 November 1989); doi: 10.1117/12.961814
Show Author Affiliations
C. Tassin, THOMSON-CSF (France)
Y. Thenoz, THOMSON-CSF (France)
R. Lemaitre, THOMSON-CSI (France)
J. Chabbal, THOMSON-CSF (France)


Published in SPIE Proceedings Vol. 1140:
X-Ray Instrumentation in Medicine and Biology, Plasma Physics, Astrophysics, and Synchrotron Radiation

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