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Proceedings Paper

Obic-Investigations Of Integrated Circuits Using A Laser Scanning Microscope With Different Excitation Wavelengths
Author(s): Harald Bergner; Tobias Damm
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Paper Abstract

A laser scanning microscope with an OBIC stage is used to investigate internal binary states of integrated circuits and diffusion parameters of the semiconductor material applying different laser wavelengths. The internal logical states of the circuit could be detected using blue and red laser radiation. Red and IR radiation are used to investigate the depth and location of doped wells. Applying three wavelengths it could be distinguished between surface and bulk recombination in the semiconductor material. The OBIC images of a CMOS inverter and a complete NOR-gate consisting of 10 transistors are analyzed in dependence on the logical input pattern.

Paper Details

Date Published: 28 September 1989
PDF: 7 pages
Proc. SPIE 1139, Optical Storage and Scanning Technology, (28 September 1989); doi: 10.1117/12.961774
Show Author Affiliations
Harald Bergner, Friedrich-Schiller-Universitat Jena (Germany)
Tobias Damm, Friedrich-Schiller-Universitat Jena (Germany)


Published in SPIE Proceedings Vol. 1139:
Optical Storage and Scanning Technology

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