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Proceedings Paper

Lateral Superdiffraction Resolution Of Phase Objects By Means Of Computer Microscope
Author(s): Vladimir P. Tychinsky
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Paper Abstract

Measurements with computer phase microscope show feasibility determination the phase object dimensions and coordinates to an accuracy depending S/N ratio δx = (S/N)-1dR where dR - Rayleigh criterion. The resolution achieved in experiment with semiconductor structures is δx = 0.02 μm. Simple theoretic models of phase objects are discussed.

Paper Details

Date Published: 28 September 1989
PDF: 3 pages
Proc. SPIE 1139, Optical Storage and Scanning Technology, (28 September 1989); doi: 10.1117/12.961766
Show Author Affiliations
Vladimir P. Tychinsky, Moscow Institute for Radioengineering (Germany)

Published in SPIE Proceedings Vol. 1139:
Optical Storage and Scanning Technology

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