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Proceedings Paper

Computer Phase Microscope For Submicron Structure Topology Monitoring
Author(s): Vladimir P. Tychinsky; Igor N. Masalov; Vladimir L. Pankov; Dmitry V. Ublinsky
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Paper Abstract

The laser interference phase-measuring computer-aided microscope enabling 3-D presentation of surface structure has been developed. Plane and height resolution numbers are 0,1μm and 1 nm. Results using this technics, application area and error sources are discussed.

Paper Details

Date Published: 28 September 1989
PDF: 4 pages
Proc. SPIE 1139, Optical Storage and Scanning Technology, (28 September 1989); doi: 10.1117/12.961765
Show Author Affiliations
Vladimir P. Tychinsky, Moscow Institute of Radioengineering (Germany)
Igor N. Masalov, Moscow Institute of Radioengineering (Germany)
Vladimir L. Pankov, Moscow Institute of Radioengineering (Germany)
Dmitry V. Ublinsky, Moscow Institute of Radioengineering (Germany)


Published in SPIE Proceedings Vol. 1139:
Optical Storage and Scanning Technology

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