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Proceedings Paper

Principles And Conception Of LCVD Reactors For Photolytic And Pyrolytic Applications In Microelectronics
Author(s): J. Rappe; O. Nicodeme
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Paper Abstract

Laser induced chemistry appears to be an important and relatively novel field of research with potential applications, for instance in microelectronics. In this area, the most developed laser processing techniques are laser lithography and laser induced pyrolytic deposition of micron scale features. This paper will focus on the laser direct writing technique where the laser is used to induce chemical vapour deposition.

Paper Details

Date Published: 11 October 1989
PDF: 2 pages
Proc. SPIE 1138, Optical Microlithography and Metrology for Microcircuit Fabrication, (11 October 1989); doi: 10.1117/12.961761
Show Author Affiliations
J. Rappe, Laser Applications Belgium S.A. (Belgium)
O. Nicodeme, Laser Applications Belgium S.A. (Belgium)

Published in SPIE Proceedings Vol. 1138:
Optical Microlithography and Metrology for Microcircuit Fabrication
Michel J. Lacombat; Stefan Wittekoek, Editor(s)

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