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Proceedings Paper

Optical Modeling Of Line Object In Microelectronics Using Radiometric Approach
Author(s): Daniel Courjon; Daniel Charraut; Eric Lantz
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Paper Abstract

A simple model describing the field reflected on a trapezoidal shape highly reflecting object is proposed. This model is based on the assumption of non interference between the bottom and the top of the line under test. Some results of simulation are presented and discussed.

Paper Details

Date Published: 11 October 1989
PDF: 5 pages
Proc. SPIE 1138, Optical Microlithography and Metrology for Microcircuit Fabrication, (11 October 1989); doi: 10.1117/12.961755
Show Author Affiliations
Daniel Courjon, C.N.R.S. (France)
Daniel Charraut, C.N.R.S. (France)
Eric Lantz, C.N.R.S. (France)

Published in SPIE Proceedings Vol. 1138:
Optical Microlithography and Metrology for Microcircuit Fabrication
Michel J. Lacombat; Stefan Wittekoek, Editor(s)

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