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Proceedings Paper

Illumination System Of An Excimer Laser Stepper
Author(s): Yutaka Ichihara; Shintaro Kawata; Ikuo Hikima; Masato Hamatani; Yuuji Kudoh; Akikazu Tanimoto
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Paper Abstract

An illumination system suitable for an excimer laser stepper has been investigated. Unnecessary interference pattern(speckel) is reduced effectively by scanning the laser beam. We report spatial coherence of the lasers with different spectral line width, illumination system of the stepper, appearance of the interference pattern,its spacing and contrust and their relation to the illumination system and to the coherence of the laser. Then we report reduction of this pattern together with a simple method to measure its contrast.

Paper Details

Date Published: 11 October 1989
PDF: 9 pages
Proc. SPIE 1138, Optical Microlithography and Metrology for Microcircuit Fabrication, (11 October 1989); doi: 10.1117/12.961754
Show Author Affiliations
Yutaka Ichihara, Nikon Corporation (Japan)
Shintaro Kawata, Nikon Corporation (Japan)
Ikuo Hikima, Nikon Corporation (Japan)
Masato Hamatani, Nikon Corporation (Japan)
Yuuji Kudoh, Nikon Corporation (Japan)
Akikazu Tanimoto, Nikon Corporation (Japan)


Published in SPIE Proceedings Vol. 1138:
Optical Microlithography and Metrology for Microcircuit Fabrication

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