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Proceedings Paper

Removal Process Of Ceramic Materials With Excimer Laser Radiation
Author(s): H. K. Tonshoff; O. Gedrat
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Paper Abstract

Because of its specific features, shortest pulses with highest pulse power, excimer laser radiation seems to be suitable for processing ceramics. It reveals high surface quality and enables a 2- or 3-dimensional structuring in the field of micro machining. This paper deals with the interaction process between ceramic materials and excimer laser radiation. The effect of different beam parameters on the removal result and the laser affected zone respectively and further capabiltities of material processing with UV-radiation for various industrial applications are discussed.

Paper Details

Date Published: 26 October 1989
PDF: 7 pages
Proc. SPIE 1132, High Power Lasers and Laser Machining Technology, (26 October 1989); doi: 10.1117/12.961569
Show Author Affiliations
H. K. Tonshoff, Laser Zentrum Hannover (Germany)
O. Gedrat, Laser Zentrum Hannover (Germany)

Published in SPIE Proceedings Vol. 1132:
High Power Lasers and Laser Machining Technology
Michel Gaillard; A. Quenzer, Editor(s)

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