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Proceedings Paper

Lixiviation Effects In Glass Polishing
Author(s): K. Holger Fiedler
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Paper Abstract

From our glass polishing process of precision optics we know that its physical-chemical nature frequently leads to a complex interaction of several parameters determining the process and the resulting quality. Surface analysis using SIMS and WDX prove that surface and sharp edge polishing of integrated optics chips has to be watched critically in order to obtain useful parts in a reproducible manner.

Paper Details

Date Published: 21 December 1989
PDF: 3 pages
Proc. SPIE 1128, Glasses for Optoelectronics, (21 December 1989); doi: 10.1117/12.961434
Show Author Affiliations
K. Holger Fiedler, Carl Zeiss (Germany)


Published in SPIE Proceedings Vol. 1128:
Glasses for Optoelectronics

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