Proceedings PaperSmall Particles And Thin Film TEM Observation On Silicon Substrate
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We applied our microcleavage technique to observe various thin films deposited on silicon substrate by evaporation and sputtering. To be observed by TEM, small particles are usually deposited on thin films such as amorphous carbon films. We present the unique possibilities of our technique to observe them when a thick brittle substrate is used. As we already did it in multilayer characterization, the substrate is used as an in-situ scale.