Proceedings PaperSmall Particles And Thin Film TEM Observation On Silicon Substrate
|Format||Member Price||Non-Member Price|
|GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free.||Check Access|
We applied our microcleavage technique to observe various thin films deposited on silicon substrate by evaporation and sputtering. To be observed by TEM, small particles are usually deposited on thin films such as amorphous carbon films. We present the unique possibilities of our technique to observe them when a thick brittle substrate is used. As we already did it in multilayer characterization, the substrate is used as an in-situ scale.