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Proceedings Paper

Small Particles And Thin Film TEM Observation On Silicon Substrate
Author(s): Yves Lepetre
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Paper Abstract

We applied our microcleavage technique to observe various thin films deposited on silicon substrate by evaporation and sputtering. To be observed by TEM, small particles are usually deposited on thin films such as amorphous carbon films. We present the unique possibilities of our technique to observe them when a thick brittle substrate is used. As we already did it in multilayer characterization, the substrate is used as an in-situ scale.

Paper Details

Date Published: 8 January 1990
PDF: 3 pages
Proc. SPIE 1125, Thin Films in Optics, (8 January 1990); doi: 10.1117/12.961369
Show Author Affiliations
Yves Lepetre, Univ. Aix Marseille III (France)

Published in SPIE Proceedings Vol. 1125:
Thin Films in Optics
Theo T. Tschudi, Editor(s)

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