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Proceedings Paper

PLZT Electro-Optical Thin Films For Integrated Optics
Author(s): A. L. Ding; W. G. Luo; Y. R . Huang; G. Dong; B. C. H. Steele
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Paper Abstract

Many types of electro-optical thin films are under investigation. Among them PLZT thin film is an attractive material due to its large electro-optical effects. Oriented PLZT thin films have been prepared on sapphire and glass substrate by R.F. magnetron sputtering using a powder target. Some properties have been studied and preliminary results are promising for applications in a variety of optical processing and computing systems. In addition PLZT thin film has also been prepared for the first time by the metallo-organic decomposition method. This method can offer lower firing temperature to form PLZT phase.

Paper Details

Date Published: 8 January 1990
PDF: 4 pages
Proc. SPIE 1125, Thin Films in Optics, (8 January 1990); doi: 10.1117/12.961368
Show Author Affiliations
A. L. Ding, Academia Sinica (China)
W. G. Luo, Academia Sinica (China)
Y. R . Huang, Academia Sinica (China)
G. Dong, Beijing Univ. of Sci. and Tech. (China)
B. C. H. Steele, Imperial College (England)

Published in SPIE Proceedings Vol. 1125:
Thin Films in Optics
Theo T. Tschudi, Editor(s)

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