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Proceedings Paper

The Influence Of Small Amounts Of Impurities In Sputtered Laser Mirrors On Their Performance
Author(s): Volker Scheuer; Carsten Schuchert; Theo Tschudi
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Paper Abstract

The absorption in Ion Beam Sputtered laser mirrors was examined. It is known that impurities influences the absorption of optical films. Therefore the impurity content of the sputtered films has been investigated using total reflection X-ray fluorescence analysis (TRFA). Impurity analysis revealed stainless steel components (iron, chromium, nickel) to be an important part of the impurities, but also material from the preceding sputter run was detected. The absorption measurement showed that besides the stainless steel components the cosputtered material leads to an enlarged absorption. These absorptions are causing mirrors deformations in a high power argon laser.

Paper Details

Date Published: 8 January 1990
PDF: 7 pages
Proc. SPIE 1125, Thin Films in Optics, (8 January 1990); doi: 10.1117/12.961355
Show Author Affiliations
Volker Scheuer, Technische Hochschule Darmstadt (Germany)
Carsten Schuchert, Technische Hochschule Darmstadt (Germany)
Theo Tschudi, Technische Hochschule Darmstadt (Germany)


Published in SPIE Proceedings Vol. 1125:
Thin Films in Optics

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