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Proceedings Paper

Optical And Electrical Properties Of D.C. Sputtered Sn[sub]1-x[/sub]Zr[sub]x[/sub]O[sub]2[/sub] Films
Author(s): Joachim Szczyrbowski; Stephan Rogels; Anton Dietrich; Hans-Ulrich Hermann
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Paper Abstract

Thin films of Sn1-xZrx02 with x ranging from 0 to 0.33 were prepared by d.c. magnetron sputtering on room temperature substrates. From the measured transmission and reflection data the optical constants were calculated. The energy gap was analysed by McLean's method. The shift of the absorption edge towards high energies with increasing Zr amount was observed. Energy gaps were found in the range from 3.8 eV for SnO2 to 4.5 eV for Sn1-xZrx02 with x=0.33. Electrical conductivity was measured in the temperature range from 20 °C to 500 °C under vacuum conditions. It turned out that at low Zr concentrations (a few per cent) the prepared oxide layers show a remarkable electrical conductivity and simultaneously higher optical transmission as pure SnO2 layers prepared under similar conditions.

Paper Details

Date Published: 8 January 1990
PDF: 7 pages
Proc. SPIE 1125, Thin Films in Optics, (8 January 1990); doi: 10.1117/12.961350
Show Author Affiliations
Joachim Szczyrbowski, Leybold AG (Germany)
Stephan Rogels, Leybold AG (Germany)
Anton Dietrich, Leybold AG (Germany)
Hans-Ulrich Hermann, Leybold AG (Germany)


Published in SPIE Proceedings Vol. 1125:
Thin Films in Optics

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