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Proceedings Paper

Electrooptical Incremental Measuring System
Author(s): Milan Suchomel; Jiri Wurtherle
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Paper Abstract

Artical is dedicated to solving some problems connected with lanufacturing accurate master scales with standard graduation of 10 μm - master scales making and checking on machine controlled by laserinterferometer - achievment the best quality of photoprocess

Paper Details

Date Published: 3 April 1989
PDF: 4 pages
Proc. SPIE 1121, Interferometry '89, (3 April 1989); doi: 10.1117/12.961338
Show Author Affiliations
Milan Suchomel, Krizik-state firm (Czech Republic)
Jiri Wurtherle, Krizik-state firm (Czech Republic)


Published in SPIE Proceedings Vol. 1121:
Interferometry '89

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