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Proceedings Paper

Interferometric Extended Refractive Index Inhomogeneity Measurement Of Optical Glass
Author(s): K. E. Elssner; R. Burow; R. Buthmann; J. Grzanna; A. Vogel
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Paper Abstract

Automatic interferometry is employed for extended refractive index inhomogeneity measurement of optical glass disks intended e.g. for manufacturing lenses of microlithographic optical systems. The effect of stress birefringence of the glass on the measuring accuracy and the influence of an optical wedge on the imaging quality of a high performance optical system are examined.

Paper Details

Date Published: 3 April 1989
PDF: 5 pages
Proc. SPIE 1121, Interferometry '89, (3 April 1989); doi: 10.1117/12.961320
Show Author Affiliations
K. E. Elssner, Akademie der Wissenschaften der DDR (Germany)
R. Burow, Akademie der Wissenschaften der DDR (Germany)
R. Buthmann, Akademie der Wissenschaften der DDR (Germany)
J. Grzanna, Akademie der Wissenschaften der DDR (Germany)
A. Vogel, Akademie der Wissenschaften der DDR (Germany)


Published in SPIE Proceedings Vol. 1121:
Interferometry '89

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