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Proceedings Paper

An Application Of Laser Interferometer
Author(s): Long-Xi Wang
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Paper Abstract

In this paper a super high precition displacement measuring device with resolution better than 0.001um is introduced. We have improved Michelson interferometer using He-Ne laser and co-optical path with double optical beams. So high stability (<0.0015um/h), high repeatability (<0.001um) and 2A sensitivity are achieved. A reference mirror excited by a osillating source forms two trains of sinusoidal waves, after being processed electronically, a subdivision of X /800 is obtained i.e. equivalent value is 0.00079um/pulse. Through special calibrating method we find the accuracy of fringe subdivision is ±0.0025um. The instrument is used to check the accuracy of micro displacement measuring comparator of which the sensitivity is 0.01um--0.001um.

Paper Details

Date Published: 3 April 1989
PDF: 6 pages
Proc. SPIE 1121, Interferometry '89, (3 April 1989); doi: 10.1117/12.961283
Show Author Affiliations
Long-Xi Wang, The Shanghai Machine Tool Works (China)

Published in SPIE Proceedings Vol. 1121:
Interferometry '89

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