Share Email Print
cover

Proceedings Paper

Three-Dimensional Interferometer System
Author(s): T. Pfeifer; J. Waltar
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

A new arrangement of interferometers allows to measure the movement of a retroreflector in space with high precision. Applications are the testing of the position accuracy of three dimensional coordinate machines, industrial mbots, tooling machines etc. This system uses four Michelson interferometers with deflector units, controlled by a servo system. For the position of the retro-reflector and the position of the deflector units are unknown at start-up, a at least ten point calibration cycle is necessary. A mathematical algorithm, using the signals of the four Michelson interferometers, allows to determine the position of the retroreflector and the deflector units in a given coordinate system.

Paper Details

Date Published: 3 April 1989
PDF: 8 pages
Proc. SPIE 1121, Interferometry '89, (3 April 1989); doi: 10.1117/12.961281
Show Author Affiliations
T. Pfeifer, Institut fur Produktionstechnologie (Germany)
J. Waltar, Institut fur Produktionstechnologie (Germany)


Published in SPIE Proceedings Vol. 1121:
Interferometry '89

© SPIE. Terms of Use
Back to Top