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Proceedings Paper

Laser Interferometer Measurement Systems For Machine Tool Industry And Microelectronics
Author(s): F. Petra; B. Popela; A. Stejskal; J. Krsek; Z. Vesela; M. Jakl
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Paper Abstract

Three laser interference measuring systems based on the Michelson interferometer with a single-frequency He-Ne laser are described. The system for machine-tool industry measures lengths with the resolution of 0.1 μm, velocities, small angles, straightness and flatness. The miniature laser interference system was intended to be built in measuring and testing machines. The system for microelectronics measures position in two orthogonal coordinates with the resolution of 40 nm.

Paper Details

Date Published: 3 April 1989
PDF: 7 pages
Proc. SPIE 1121, Interferometry '89, (3 April 1989); doi: 10.1117/12.961280
Show Author Affiliations
F. Petra, Czechoslovak Academy of Sciences (Czech Republic)
B. Popela, Czechoslovak Academy of Sciences (Czech Republic)
A. Stejskal, Czechoslovak Academy of Sciences (Czech Republic)
J. Krsek, Czechoslovak Academy of Sciences (Czech Republic)
Z. Vesela, Czechoslovak Academy of Sciences (Czech Republic)
M. Jakl, Czechoslovak Academy of Sciences (Czech Republic)


Published in SPIE Proceedings Vol. 1121:
Interferometry '89

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