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Proceedings Paper

Simulating The Profilometric Measurement Using A Computer Generated Profile
Author(s): Bernd Harnisch; Horst Truckenbrodt
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Paper Abstract

A correlated profile with normal distributed ordinates was computer-generated and the interferometrical measuring process of surface microprofilometry was simulated for a simultaneously measuring interference microscope with a CCD-row and and a profilometer measuring point-by-point. The dependence of the short and high spatial frequency bandlimit on the measured profile and the calculated roughness parameters and statistical functions are shown.

Paper Details

Date Published: 3 April 1989
PDF: 8 pages
Proc. SPIE 1121, Interferometry '89, (3 April 1989); doi: 10.1117/12.961256
Show Author Affiliations
Bernd Harnisch, The Friedrich-Schiller- University Jena (Germany)
Horst Truckenbrodt, The Friedrich-Schiller- University Jena (Germany)

Published in SPIE Proceedings Vol. 1121:
Interferometry '89

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