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Proceedings Paper

Investigation Of Surface Shapes Using A Carrier Frequency Based Analysing System
Author(s): G. Frankowski; I. Stobbe; W. Tischer; F. Schillke
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Paper Abstract

A basic requirement in applying interferometrical methods to measurement, testing and inspection is to evaluate the phase differences between the interfering waves very quickly and with high accuracy. Different methods and equipments to phase detection and evaluation in interferometry have been published during the last years. The aim of this paper now is to present theoretical and experimental results to apply so-called carrier frequency techniques for determining phase differences in interferometry.

Paper Details

Date Published: 3 April 1989
PDF: 12 pages
Proc. SPIE 1121, Interferometry '89, (3 April 1989); doi: 10.1117/12.961254
Show Author Affiliations
G. Frankowski, Academy of Sciences of GDR (Germany)
I. Stobbe, Academy of Sciences of GDR (Germany)
W. Tischer, Academy of Sciences of GDR (Germany)
F. Schillke, Academy of Sciences of GDR (Germany)


Published in SPIE Proceedings Vol. 1121:
Interferometry '89

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