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Proceedings Paper

Spatial Carrier Heterodyne Techniques For Precision Interferometry And Profilometry: An Overview
Author(s): Mitsuo Takeda
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Paper Abstract

An overview is given on the principle and the recent development of the spatial-carrier fringe-pattern analysis techniques, and their application areas are introduced.

Paper Details

Date Published: 3 April 1989
PDF: 16 pages
Proc. SPIE 1121, Interferometry '89, (3 April 1989); doi: 10.1117/12.961253
Show Author Affiliations
Mitsuo Takeda, University of Electro-communications (Japan)


Published in SPIE Proceedings Vol. 1121:
Interferometry '89

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