Share Email Print
cover

Proceedings Paper

Thin-film thickness measurement method based on the reflection interference spectrum
Author(s): Li Na Jiang; Gao Feng; Zhang Shu
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

A method is introduced to measure the thin-film thickness, refractive index and other optical constants. When a beam of white light shines on the surface of the sample film, the reflected lights of the upper and the lower surface of the thin-film will interfere with each other and reflectivity of the film will fluctuate with light wavelength. The reflection interference spectrum is analyzed with software according to the database, while the thickness and refractive index of the thin-film is measured.

Paper Details

Date Published: 15 October 2012
PDF: 6 pages
Proc. SPIE 8415, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 84150P (15 October 2012); doi: 10.1117/12.961242
Show Author Affiliations
Li Na Jiang, Univ. of Science and Technology Liaoning (China)
Gao Feng, Univ. of Science and Technology Liaoning (China)
Zhang Shu, East Port Technology Development Co., Ltd. (China)


Published in SPIE Proceedings Vol. 8415:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes
Wenhan Jiang; Myung K. Cho; Fan Wu, Editor(s)

© SPIE. Terms of Use
Back to Top