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Proceedings Paper

Applications Of Heterodyne Interferometry To Disc Drive Technology
Author(s): Robert Davidson
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Paper Abstract

The challenges to metrology provided by the extreme precision required by disc memory technology is described. Heterodyne interferometry is shown to be able to meet the metrology requirements and to provide a more direct interpretation of the results than other methods.

Paper Details

Date Published: 5 August 1986
PDF: 3 pages
Proc. SPIE 0621, Manufacturing Applications of Lasers, (5 August 1986); doi: 10.1117/12.961156
Show Author Affiliations
Robert Davidson, Hewlett Packard Laboratories (United States)

Published in SPIE Proceedings Vol. 0621:
Manufacturing Applications of Lasers
Peter K. Cheo, Editor(s)

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